maboudianlab - Gwiy Sang Chung

Alumnus - Visiting Scholar

Ph.D, Toyohashi Univ. of Tech. Toyohashi, Electrical & Electronic Eng.,JAPAN

MS, Yeungnam Univ. Gyongsan, Electronic Eng., SOUTH KOREA

B.S., Yeungnam Univ. Gyongsan, Electronic Eng., SOUTH KOREA

Current Position:

Department of Mechatronics Engineering
Dongseo University, San69-1 Churyedong Sasanggu Busan 107-716,
SOUTH KOREA
Tel: +82-51-320-1763
Fax: +82-51-328-1569

Home: 120-1604 LG Metrocity Yonghodong Namgu Busan, 608-091 SOUTH KOREA
Tel: +82-51-612-8089

Research:

• 3C-SiC Crystal growth on Si wafers by APCVD.
• Evaluation of 3C-SiC thin-films grown on Si wafers
• Oxidation, metalization(Ohmic contact), etching(RIE, ICP RIE) process techniques of
3C-SiC thin-films
• High temperature pressure, flower and magnetic sensors using 3C-SiC thin-films.
• Anodic Bonding of Si wfer to MLCA(Multi Layer Ceramic Actuator)
• Piezo mcro valve uing MLCA.
• Fabrication and aalysis of 3D SiCN mcrostructures for 1400℃ super-temperature
MEMS applications.