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Group Leader

Roya Maboudian

My main research interests are in the  areas of surface/interfacial science and engineering of micro-/nanosystems, and thin-film science and technology.

 

 

Research Staff

Carlo Carraro

My main research interests are in surface science and atomic beams, mechanical properties of thin films and membranes, and computational nanoscience.

 

Post-doctoral Fellows

Nicola Ferralis

My current research focuses on the synthesis and characterization of epitaxial graphene from silicon carbide for electronic and sensing applications; surface alloying of gold microparticles on silicon surfaces and during growth of silicon nanowires.

 

Marta Cerruti 

My main project consists in the development of a humidity-insensitive sensor for small molecules in the gas phase, and my secondary project involves the synthesis of Pt nanoparticles and films on Si substrates using galvanic displacement.


 

Ian Laboriante

My current research work involves the investigation of: 1) nanotribological properties of novel MEMS devices and test structures; 2) interfacial properties of metal-based MEMS structural materials; 3) reliability issues in MEMS devices; 4) scanning probe nanolithography on Si substrates.

 

Albert Gutés

My current research focuses on Surface-Enhanced Raman Spectroscopy  (SERS), with the aim of developing more reproducible substrates with  high enhancement factors for low limits of detection.

 

Dae Ho Lee

My current research focuses on the development of bio-inspired nanostructured surfaces to achieve high performances in adhesion and friction.  

 

 

Graduate Students

Brian Bush

I am investigating various aspects of self assembly on solid surfaces, such as their growth dynamics and their effectiveness in micro/nanomachines.  I am also interested in the synthesis and characterization of bio-inspired dry adhesives. 

 

Greg Doerk

My current research is directed towards the synthesis of silicon nanowires by the vapor-liquid-solid technique, their integration into ultrasensitive resonant mass detectors, and the characterization of their mechanical and thermal properties.

  

Wei-Cheng Lien

My current research is to develop, optimize and scale-up epitaxial SiC thin film for the nanoelectronic device application and graphitization. 

 

 

John Alper 

 

 

 

 

 

Benjamin Hsia

 

 

 

 

Jim Krier

 

 


 

 

 Fang Liu

My current research includes surface engineering of micro- and nano-electromechanical systems (M/NEMS) and materials development for high performance M/NEMS. 

 

 

Yifeng Chen

 

 

 

 

Visiting Scholars

Mark Allendorf

My research interest includes computational tools to model problems in high-temperature industrial and materials chemistry particularly involving processes at interfaces. 

 

 

Undergraduate Students

 Jason Daniel Evans

 I typically work with Brian in developing and testing synthetic gecko-inspired dry adhesives.

 

 Chris Leksono

 My research involves minimizing/eliminating the issue of stiction in optoelectronic tweezers.

 

 

 Gabriella Lestari

I am investigating the growth rate and tapering of silicon nanowires using gold colloids as catalyst.

 

Rosanna Lim

I am doing research on the galvanic deposition of ruthenium, platinum, and gold on silicon substrates.

 

  

 

Group Alumni

Ph.D. Students: Jon Kluth Structure and Stability of Surface Passivation Layers on Semiconductor Materials

Mike Houston Surface Treatments for Adhesion Reduction in Polysilicon Micromechanical Devices

W. Robert Ashurst Surface Engineering for MEMS Reliability (also alumnus postdoctoral fellow)

Di Gao Silicon Carbide Technology for MEMS and NEMS Applications (co-advised by Roger T. Howe)

Teris Liu Microfabricated “Lab-on-a-chip” Analysis System (co-advised by Richard Mathies)

Jingchun Zhang Silicon Carbide and Diamond Materials Development for MEMS and NEMS (co-advised byRoger T. Howe)

Calvin DaRosaCatalyst Deposition for Microreactors Using Galvanic Displacement (co-advised byEnrique Iglesia

Christopher Roper Silicon Carbide Thin Films via LPCVD for MEMS and NEMS (co-advised by Roger T. Howe)


Noel Arellano Silicon nanowire based electromechanical systems
(co-advised by Roger T. Howe)


Masters Students: Rajan Kukreja Characterization of Poly-crystalline Silicon-Germanium Alloys for MEMS Applications

Kim Cheung Novel Materials for High Temp Microreactors (co-advised byEnrique Iglesia)

Mike Pullon Molecular Dynamics Simulation of Hydrogen Adsorption on Si(100)

Elizabeth Parker Surface Modifications of Si-based MEMS Devices

Melitta Hon Corrosion of Polysilicon MEMS under High Relative Humidity and Actuation Voltage


Postdoctoral Fellows: Hyuneui Lim Surface Modification of InP-based MEMS

Muthu Wijesundara Low-temperature Growth, Doping and Metallization of SiC for MEMS Applications

Sang Han Surface Passivation Chemistry of Ge

Myung Mo Sung Surface Modification using Self-Assembled Monolayers

Michaela FritzSurface Modification of Silicon: Understanding and Controlling Interfacial Forces in Microdevices

Conrad Stoldt Novel Surface Coatings and Structural Materials for MEMS; Surface Science of C60 and SiC Thin Films.

Yuko Ueno Characterizations of Diamondoid Molecules and Thin-films

Joelle Frechette Investigation of Wear in MEMS

Frank DelRio Low-temperature MEMS Technology

 

Visiting Scholars: Luca Magagnin Deposition of Cu and Au on Silicon, integration of metals in MEMS technology

Gianluca Valente Silicon Carbide Deposition Modeling through Quantum Mechanical Calculation for the Estimation of the Adsorbtion Kinetics of the Precursor on the Surface

Guohua Xu Conducting Self Assembled Layers for MEMS Anti-stiction

Ilaria Lombardi Template-assisted growth of inorganic nanostructures

Alessandro Veneroni Silicon carbide multiscale reactor  modeling

 

Gwiy-Sang Chung Silicon carbide technology for MEMS


Farzaneh Hosseinpour RajabiThermodynamic, Electrochemical and Viscometric Studies on Polymer-Polymer Interactions and Formation of Interpolymer Complexes, Nanotechnology Complexes, Nanotechnology


Bahman Vasheghani Farahani Intermacromoleculars Interactions, Polymer Metal Complexes, Polymer Characterization, Microencapsulation, Nanotechnology 

 

 Stefano Fissolo functionalization of epitaxial graphene with organic molecules



Undergrad Researchers:

Edgar Felipe Garay

Jason Kawasaki 

Brent Rich

Katherine Stapleton

Victor Chan

Gail Hernandez

Justin Opatkiewicz

Connie Chung

Nicolas Londoño

Christina Lee

Selene Koo

Ajay Kshatriya

Usman bin Habib al Paki

Anna Remennik

Siswanto Sutanto

Amol Upadhye

Christina Yau

Oranna Yauw

Erfan Gunawan

Chia Wen