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Applied Materials and Surface Science Laboratory

    

 

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2008

 

M. Rosso, A. Arafat, K. Schroën, M. Giesbers, C. S. Roper, R. G. White, E. J.R. Sudhölter, R. Maboudian, H. Zuilhof, “Covalent Attachment of Organic Monolayers to Silicon Carbide Surfaces”, Langmuir 24, 4007-4012 (2008).
 

J. Zhang, J. W. Zimmer, R. T. Howe, R. Maboudian, “Characterization of Boron-doped Micro- and Nanocrystalline Diamond Films Deposited by Wafer-scale Hot Filament Chemical Vapor Deposition 
for MEMS Applications”, Diamond and Related Materials 17, 23-28 (2008).

 

C.S. Roper, V. Radmilovic, R. T. Howe, R. Maboudian,  “Characterization of Polycrystalline 3C-SiC Films Deposited from the  Precursors 1,3-Disilabutane and Dichlorosilane”, Journal of Applied Physics 103, 084907(1-6) (2008).
 

M. Hon, F. DelRio, J.T. White, M. Kending, C. Carraro, R.  Maboudian, “Cathodic Corrosion of Polycrystalline Si MEMS”, Sensors  and Actuators A145-146, 323-329 (2008).

 

C. daRosa, E. Iglesia, R. Maboudian, “Copper Deposition  onto Silicon by Galvanic Displacement: Effect of Silicon Dissolution  Rate”, Journal of the Electrochemical Society 155, E70-E78 (2008).

 

Ferralis, N., Maboudian, R., and Carraro, C., "Temperature-Induced Self-Pinning and Nanolayering of AuSi Eutectic Droplets", J. Am. Chem. Soc. 130 (8)  (2008), 2681 -2685.

 

Roper, C. S., Radmilovic, V., Howe, R. T., and Maboudian, R., "Effects of annealing on residual stress and strain gradient of doped polycrystalline silicon carbide thin films", Electrochemical and Solid-State Letters, 11, D35-D37 (2008).

 

C. daRosa, E. Iglesia, R. Maboudian, “Dynamics of Cu deposition onto  Si by Galvanic Displacement”, Journal of the Electrochemical Society  155, D234 (2008).
 


2007

 

C. Carraro, R. Maboudian, L. Magagnin, "Metallization and nanostructuring of semiconductor surfaces by galvanic displacement processes", Surf. Sci. Reports 62 (12), 499-525 (2007). 

 

B.G.Bush, F.W. DelRio, J.Opatkiewiez, R. Maboudian, C. Carraro, "nCEffect of formation temperature and roughness on surface potential of octadecyltrichlorosilane self-assembled monolayer on silicon surfaces", J. Phys. Chem. C, 111, 49, 12339-12343 (2007).

 

J. Zhang, C. Carraro,  R.T. Howe, and R. Maboudian, “Electrical, mechanical and metal contact properties of polycrystalline 3C-SiC films for MEMS in harsh environments”, Surface and coating Technology 201 (22-23), 8893-8898 (2007).

 

F.W. DelRio, J. Lai, N. Ferralis, T-J. K. Liu, R. Maboudian, "Al-2%Si Induced Crystallization of Amorphous Silicon", Electrochemical and Solid-State Letters, 10 11 H337-H339 (2007)

 

Ferralis, N., Maboudian, R., and Carraro, C., "Structure and Morphology of Annealed Gold Films Galvanically Displaced on the Si(111) Surface", J. Phys. Chem. C, 111, 20, 7508 - 7513 (2007).

 

I. Lombardi, P. L. Cavallotti, C. Carraro, and R. Maboudian, "Template assisted deposition of Ag nanoparticle arrays for surface-enhanced Raman scattering applications", sensors and actuators B-chemical 125 (2), 353-356, (2007).

 

A. San Paulo, N. Arellano, J.A. Plaza, R.R. He, C. Carraro, R. Maboudian, R. T. Howe, J. Bokor, P.D. Yang, "Suspended mechanical structures based on elastic silicon nanowire arrays", Nano Letters 7 (4): 1100-1104, (2007). 

 

V. Radmilovic, U. Dahmen, D. Gao, C.R. Stoldt, C. Carraro, and R. Maboudian, “Nucleation and Growth of 3C-SiC Films on Si(100) Substrate”, Diamond and Related Materials 16, 74-80 (2007).

 

 

2006

 

J. Frechette, C. Carraro, "Resolving radial composition gradients in polarized confocal Raman spectra of individual 3C-SiC nanowires", J. Am. Chem. Soc. 128 (46), 14774-14775 (2006).

 

J. Frechette, C. Carraro, " Diameter-dependent modulation and polarization anisotropy in Raman scattering from individual nanowires", Phys. Rev. B 74 (16), 161404  (2006). 

 

I. Lombardi, L. Magagnin, P. L. Cavallotti, C. Carraro, and R. Maboudian, Electrochemical fabrication of supported Ni nanostructures through transferred porous anodic alumina mask, Electrochemical and Solid State Letters 9 (5), D13-D16 (2006).

 

J. Oomens, N. Polfer, O. Pirali, Y. Ueno, R. Maboudian, P.W. May, J. Filik, J.E. Dahl, S.G. Liu, R.M.K. Carlson "Infrared spectroscopic investigation of higher diamondoids", Journal of Molecular Spectroscopy 238, 158-167 (2006).

C. Roper, R. Howe, and R. Maboudian, "Stress control of polycrystalline 3C-SiC films in a large-scale LPCVD reactor using 1,3-disilabutane and dichlorosilane as precursors", J. Micromechanics and Microengineering 16 (2006) 2736-2739.

 

C. Roper, C. Carraro, R. Howe, and R. Maboudian, “Silicon Carbide Thin Films using 1,3-Disilabutane Single Precursor for MEMS Applications - A Review”, ECS Trans. 3, (10) 267 (2006)

 

J. Frechette, R. Maboudian and C. Carraro, “Effect of Temperature on In-use Stiction of Cantilever Beams Coated with Perfluorinated Alkysiloxane Monolayers”, Journal of Microelectro-mechanical Systems 15, 737-744 (2006).

J. Zhang, R.T. Howe, and R. Maboudian, “Control of Strain Gradient in Polycrystalline Silicon Carbide Films through Tailored Doping”, Journal of Micromechanics and Microengineering16, L1-L5 (2006).

C. Majidi, R.E. Groff, K. Autumn, S. Baek, B. Bush, R. Maboudian, N. Gravish, Y. Maeno, B. Schubert, M. Wilkenson and R. Fearing, “High Friction from a Stiff Fiber using Micro-Fiber Arrays”, Physical Review Letters 97, 76103-06 (2006).

 

C. Roper, V. Radmilovic, R. Howe, and R. Maboudian “Single-Source Chemical Vapor Deposition of SiC Films in a Large-scale LPCVD Reactor: Growth, Chemical, and Mechanical Characterization”, Journal of the Electrochemical Society, 153 (8) C562-C566 (2006).

 

J. Frechette, R. Maboudian, and C. Carraro, “Thermal Behavior of Perfluoroalkylsiloxane Monolayers on the Oxidized Si(100) Surface”, Langmuir 22, 2726-2730 (2006).

B. Bush, Z. Xu, C. Carraro, and R. Maboudian, “Layer-by-Layer Self-Assembled Conductive Thin Films for MEMS Applications”, Sensors and Actuators A 126, 194-200 (2006).

I. Lombardi, L. Magagnin, P. L. Cavallotti, C. Carraro, and R. Maboudian, “Electrochemical Fabrication of Supported Ni Nanostructures through Transferred Porous Anodic Alumina Mask”, Electrochemical and Solid State Letters 9, D13-16 (2006).

I. Lombardi, A. Hochbaum, P. Yang, C. Carraro, and R. Maboudian, “Synthesis of High Density, Size Controlled Si Nanowire Arrays via Porous Anodic Alumina Mask”, Chemistry of Materials 18, 988-991 (2006).

J. Zhang, R.T. Howe, and R. Maboudian, “Electrical Characterization of n-type Polycrystalline 3C-Silicon Carbide Thin Film Deposited by 1,3-Disilabutane”, Journal of the Electrochemical Society 153, G548-551 (2006).

 

 

2005

 

S. Bhave, D. Gao and R. T. Howe, R. Maboudian, “Fully Differential Poly-SiC Lamé Mode Resonator and Checkboard Filter”, Technical Digest, Proceedings of the 2005 MEMS Workshop, MEMS’05, January 2005, pp. 223-336.

R. He, D. Gao, R. Fan, A. Hochbaum, C. Carraro, R. Maboudian, P. Yang, "Si Nanowire Bridges in Micro-trenches: Integration of Growth into Device Fabrication", Advanced Materials 17, 2098 (2005).

A. San Paulo, J. Bokor, R. T. Howe, R. He, P. Yang, D. Gao, C. Carraro, R. Maboudian, "Mechanical Elasticity of Single and Double Clamped Silicon Nanobeams Fabricated by Vapor-Liquid-Solid Synthesis", Applied Physics Letters 87, 53111-53113 (2005).

E.E. Parker, C. Carraro, R. Maboudian, "Adhesion Characteristics of MEMS in Microfluidic Environments", Journal of Microelectromechanical Systems 14, 947-953 (2005).

D. Gao, R. He, C. Carraro, R. T. Howe, P. Yang, and R. Maboudian, "Selective Growth of Si Nanowires Arrays via Galvanic Displacement Processes", Journal of the American Chemical Society 127, 4574-4575 (2005).

 

 

2004


D. Gao, C. Carraro, V. Radmilovic, R.T.Howe and R. Maboudian, "Fracture of Polycrystalline 3C-SiC Films in MEMS", Journal of Microelectromechanical Systems 13, 972-976 (2004).

M.B.J. Wijesundara, D.C. Walther, C.R. Stoldt, K. Fu, D. Gao, C. Carraro, R. Maboudian, A.P. Pisano, "Low Temperature CVD SiC Coated Si Microcomponents for Reduced Scale Engines", ASME International Mechanical Engineering Congress and R&D Expo, in press.

W. R. Ashurst, Y. J. Jang, L. Magagnin, C. Carraro, M. M. Sung, R. Maboudian, "Nanometer-Thin Titania Films with SAM-level Stiction and Superior Wear Resistance for Reliable MEMS Performance", Proceedings of IEEE MEMS Conference, Maastricht, the Netherlands, January 2004, pp. 153-156.

E.E. Parker, W. R. Ashurst, C. Carraro, R. Maboudian, "Stiction in Microfluidic Environments", Technical Digest, Proceedings of the 2002 Solid-State Sensor and Actuator Workshop, Hilton Head '04, June 2004, pp. 316-319.

W. R. Ashurst, M. B.J. Wijesundara, C. Carraro, R. Maboudian, "Tribological Impact of SiC Encapsulation of Released Polysilicon Microstructures", Tribology Letters 17, 195-198 (2004).

H. Lim, C. Carraro, R. Maboudian, M. Pruessner, R. Ghodssi, "Chemical and Thermal Behavior of Alkanethiol and Sulfur Passivated InP(100)", Langmuir 20, 743-747 (2004).

M.P. de Boer, D.L. Luck, W.R. Ashurst, R. Maboudian, A.D. Corwin, J.A. Walraven, J.M. Redmond, "High-performance Surface-micromachined Inchworm Actuator", Journal of Microelectromechanical Systems 13, 63-74 (2004).

R. Maboudian, C. Carraro, "Surface Chemistry and Tribology of MEMS", Annual Review of Physical Chemistry 54, 35-54 (2004).

D. Gao, W.B.J. Wijesundara, C. Carraro, R.T. Howe, and R. Maboudian, “Recent Progress Toward A Manufacturable SiC Surface Micromachining Technology,” IEEE Sensors Journal, vol. 4(4), special issue on "Micro-Sensors and Micro-Actuators: Technology and Applications," 441-448 (2004).

D. Gao, W.R. Ashurst, C. Carraro, R.T. Howe, and R. Maboudian, “Silicon Carbide for Enhanced MEMS Reliability,” Tech. Dig. Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, 192-195 (2004).


R. Ashurst, C. Carraro, J.D. Chinn, V. Fuentes, B. Kobrin, R. Maboudian, R. Nowak, R. Yi. "Improved vapor-phase deposition technique for anti-stiction monolayers," Proceedings of SPIE - the International Society for Optical Engineering, 5342(1), 204-211 (2004).

G. Valente, M.B.J. Wijesundara, R. Maboudian, C. Carraro. "Single-source CVD of 3C-SiC films in a LPCVD Reactor Part II: Reactor Modeling and Chemical Kinetics," Journal of the Electrochemical Society, 151(3), C215-19 (2004).

M.B.J. Wijesundara, G. Valente, W.R. Ashurst, R.T. Howe, A.P. Pisano, C. Carraro, R. Maboudian. "Single-source chemical vapor deposition of 3C-SiC films in a LPCVD Reactor Part I: Growth, Structure and Chemical Characterization," Journal of the Electrochemical Society, 151(3), C210-14 (2004).

 

D. Gao, M.B.J. Wijesundara, C. Carraro, R.T. Howe, and R. Maboudian,"Transformer Coupled Plasma Etching of 3C-SiC Films using Fluorinated Chemistry for MEMS Applications," Journal of Vacuum Science & Technology B, 22(2), 513-518 (2004), selected for the March 1, 2004 issue of Virtual Journal of Nanoscale Science & Technology.

 

 

2003

 

R. Maboudian, C. Carraro, "Surface Engineering for Reliable Operation of MEMS Devices", Journal of Adhesion Science and Technology 17, 583-591 (2003).

W.R. Ashurst, C. Carraro, R. Maboudian. "Vapor phase anti-stiction coatings for MEMS," IEEE Transactions on Device & Materials Reliability, 3(4), 173-178 (2003).


A.C. Fernandez-Pello, A.P. Pisano, K. Fu, D.C. Walther, A. Knobloch, F. Martinez, M. Senesky, C. Stoldt, R. Maboudian, S. Sanders, D. Liepmann. "MEMS rotary engine power system," Transactions of the Institute of Electrical Engineers of Japan, Part E, 123-E(9), 326-30 (2003)

 

M.B.J. Wijesundara, D. Gao, C. Carraro, R.T. Howe, and R. Maboudian, "Nitrogen Doping of Polycrystalline 3C-SiC Films Grown using 1,3-Disilabutane in a Conventional LPCVD Reactor," Journal of Crystal Growth, 259, 18-25 (2003).

D. Gao, M.B.J. Wijesundara, R.T. Howe, and R. Maboudian, "Characterization of Residual Strain in SiC Films Deposited using 1,3-Disilabutane for MEMS Applications," Journal of Microlithography, Microfabrication, and Microsystems, 2 (4), 259-264 (2003).

 

G. Valente, C. Stoldt, R. Maboudian, and C. Carraro, "Theoretical and Experimental Study of the Chemisorption of 1,3-disilabutane on the Si(100) Surface", Journal of Chemical Physics118, 6089-6097 (2003).

 

W. R. Ashurst, M. P. deBoer, C. Carraro, and R. Maboudian, "An Investigation of Side-wall Adhesion in MEMS", Applied Surface Science212-213, 735-41 (2003).

 

W. R. Ashurst, C. Carraro, R. Maboudian, and W. Frey, "Wafer Level Anti-Stiction Coatings with Superior Thermal Stability", Sensors and Actuators A104, 213-221 (2003).

 

L. Magagnin, R. Maboudian and C. Carraro, "Adhesion Evaluation of ImmersionPlating Copper Films on Silicon by Microindentation Measurements", Thin Solid Films, 434, 100-105 (2003).

 

D. Gao, R.T. Howe, and R. Maboudian, "High-selectivity Etching of Polycrystalline 3C-SiC Films using HBr-based Transformer Coupled Plasma", Applied Physics Letters, 82 (11), 1742-4 (2003). & Selected paper, Virtual Journal of Nanoscale Science & Technology, Volume 7 (12), 2003.

D. Gao, M.B.J. Wijesundara, C. Carraro, C.W. Low, R.T. Howe, and R. Maboudian, “High Modulus Polycrystalline 3C-SiC Technology For RF MEMS”, Proc. Transducers’03, The 12th International Conf. Solid-State Sensors & Actuators, 1160-1163.

 

 

2002

 

W. R. Ashurst, C. Carraro, and W. Frey, R. Maboudian, "Wafer Level Anti-Stiction Coatings with Superior Thermal Stability", Technical Digest, Proceedings of the 2002 Solid-State Sensor and Actuator Workshop, Hilton Head '02, June 2002, pp. 142-145.

 

C. Carraro and L. Magagnin, R. Maboudian, "Selective Metallization of Si Micromechanical Devices", Electrochimica Acta 47, 2583-2588 (2002).

 

L. Magagnin V. Bertani, P.L. Cavallotti, R. Maboudian and C. Carraro "Selective deposition of gold nanoclusters on silicon by a galvanic displacement process", Microelectronic Engineering, 64, 479-485 (2002).

M. B. J. Wijesundara, C. R. Stoldt, C. Carraro, R. T. Howe and R. Maboudian, "Nitrogen Doping of 3C-SiC Films Grown by Single-Source Chemical Vapor Deposition", Journal of Thin Solid Films419, 69-75 (2002).

C.R. Stoldt, C. Carraro, W.R. Ashurst, D. Gao, R. T. Howe and R. Maboudian, "A Low-Temperature CVD Process for Silicon Carbide MEMS," Sensors and Actuators A 97, 410-415 (2002).

 

L. Magagnin, R. Maboudian and C. Carraro, "Gold Deposition by Galvanic Displacement on Semiconductor Surfaces: Effect of Substrate on Adhesion", Journal of Physical Chemistry B 106, 401-407 (2002).

 

R. Maboudian, W. R. Ashurst and C. Carraro, "Tribological Challenges in MEMS", Tribology Letters 12, 95-100 (2002).

 

 

2001

 

W. R. Ashurst, C. Yau, C. Carraro, R. Maboudian and M. T. Dugger, "Dimethyldichlorosilane as Anti-Stiction Coating for MEMS: a Quantitative Comparison to Octadecyltrichlorosilane", Journal of Microelectromechanical Systems 10, 41-49 (2001).

 

W. R. Ashurst, C. Yau, C. Carraro and R. T. Howe, and R. Maboudian, "Alkene Based Monolayer Films as Anti-Stiction Coatings for Polysilicon MEMS", Sensors and Actuators A 91, 239-248 (2001).

 

M. C. Salvadori, M. C. Fritz, C. Carraro, R. Maboudian, O. R. Monteiro and I. G. Brown, "Characterization of AFM Cantilevers Coated with Diamond-like Carbon", Diamond and Related Materials 10, 2190-2194 (2001).

 

M. C. Fritz, C. Carraro, and R. Maboudian, "Functionalization of Scanning Force Microscopy Cantilevers via Galvanic Displacement Technique", Tribology Letters11, 171-175 (2001).

 

C.R. Stoldt, M.C. Fritz, C. Carraro, and R. Maboudian, "Micromechanical Properties of Silicon Carbide Thin Films Deposited Using Singe-Source CVD," Applied Physics Letters 79, 347 (2001) .

 

C.R. Stoldt, C. Carraro, W.R. Ashurst, M.C. Fritz, D. Gao, and R. Maboudian, "Novel Low-Temperature CVD Process for Silicon Carbide MEMS," Proceedings Transducers '01, Proceedings of 11th International Conference on Solid State Sensors and Actuators / Eurosensors XV, Munich, Germany, June 10-14, pp.984-987.

 

C. R. Stoldt, R. Maboudian, and C. Carraro, "Vibrational Spectra of Hydrogenated Buckminsterfullerene: A Candidate for the Unidentified Infrared Emission", The Astrophysical Journal Letters, Feb. 20, 2001.

 

L. Magagnin, R. Maboudian, and C. Carraro, "Selective Deposition of Thin Copper Films onto Silicon with Improved Adhesion", Electrochemical and Solid-State Letters, 4, 2001.

 

Sang M. Han, W. Robert Ashurst, Carlo Carraro, and Roya Maboudian, "Formation of Alkanethiol Monolayer on Ge(111)", Journal of the American Chemical Society, 2001.

 

 

2000

 

C.R. Stoldt, C. Carraro, R. Maboudian, "Deuterium etching of the Si-rich SiC(0001) (3×3) surface reconstruction", Surface Science, 466, pp. 66-72 (2000)

 

C. Cabuz, E. I. Cabuz, T. R. Ohnstein, J. Neus, and R. Maboudian, "Factors Enhancing the Reliability of Touch-Mode Electrostatic Actuators", Sensors and Actuators A 79, 245-25 (2000).

 

M. M. Sung, C. Carraro, O. W. Yauw, and Y. Kim,g, C. Carraro, O. W. Yauw, and Y. Kim, and R. Maboudian, "Reversible Liquid-Liquid Transitions in the Early Stages of Monolayer Self-Assembly", Journal of Physical 

Chemistry", Journal of Physical Chemistry B 104, 1556-1559 (2000).

 

W. R. Ashurst, C. Carraro, and R. Maboudian, "Self-Assembled Monolayers as Anti-Stiction Coating for MEMS: Characteristics and Recent Progress", Sensors and Actuators A 82, 219-223 (2000).

 

W. R. Ashurst, C. Yau, C. Carraro and R. T. Howe, "Alkene Based Monolayer Films as Anti-Stiction Coatings for Polysilicon MEMS", Proceedings of Solid-State Sensor and Actuator Workshop, Hilton Head 2000, Hilton Head Island, SC, June 2000, pp. 320-323.

 

 

1999

 

M.M. Sung, G.J. Kluth, and R. Maboudian, "Formation of Alkylsiloxane Monolayers on Si3N4" , Journal of Vacuum Science and Technology A 17, 540-544 (1999).

 

G.J. Kluth, C. Carraro and and R. Maboudian, "Direct Observation of Sulfur Dimers in Alkanethiol Self-Assembled Monolayers on Au" , Physcial Review B 59, 10449-10452 (1999).

 

R. Maboudian, "Self-Assembled Monolayers as Anti-Stiction Coating for MEMS", invited review article, 10th International Conference on Solid-State Sensors and Actuators, Transducers'99, pp.22-25, 1999.

 

M. M. Sung, G. J. Kluth, and R. Maboudian, "Alkylsiloxane Self-Assembled Monolayers on Si3N4", Journal of Vacuum Science and Technology A 17, 540-544 (1999).

 

 

1998

 

R. Maboudian, "Surface Processes in MEMS Technology" , Surface Science Reports, 30, 207-270 (1998).

 

U. Srinivasan, M. R. Houston, R. T. Howe, and R. Maboudian, "Alkylsiloxane-based Self-Assembled Monolayers for Stiction Reduction in Silicon Micromachines", Journal of Micro-Electro-Mechanical Systems, 7, 252-260 (1998).

 

G. J. Kluth, M. Sander, M. M. Sung, and R. Maboudian, "Study of the Desorption Mechanism of Alkylsiloxane Self-Assembled Monolayersthrough Isotopic Labeling and HREELS Experiments" , Journal of Vacuum Science and Technology A, 16, 932-936 (1998).

 

R. Maboudian, "Adhesion and Friction Issues Associated with Reliable Operation of MEMS", Materials Research Society Bulletin, 23, 47-51 (1998).

 

U. Srinivasan, R. T. Howe, and R. Maboudian, "Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements" , Proceedings of Tribology Issues and Opportunities in MEMS Workshop, Kluwer Academic Publishers, Dordrecht, pp. 597-606 (1998).

 

U. Srinivasan, J. D. Foster, U. Habib, R. T. Howe, R. Maboudian, D. C. Senft, and M. T. Dugger, "Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers" , Technical Digest, Proceedings of the 1998 Solid-State Sensor and Actuator Workshop, Hilton Head '98 , pp. 156-161 (1998).

 

C. Cabuz, E. I. Cabuz, T. R. Ohnstein, J. Neus, and R. Maboudian, "High Reliability Touch-Mode Electrostatic Actuators (TMEA)" , Technical Digest, Proceedings of the 1998 Solid-State Sensor and Actuator Workshop, Hilton Head '98 , pp. 296-299 (1998).

 

C. Carraro, O. W. Yauw, M. M. Sung, and R. Maboudian, "Observation of Three Growth Mechanisms in Self-Assembled Monolayers" , Journal of Physical Chemistry, 102, pp. 4441-4445 (1998).

 

R. Maboudian, "Anti-Stiction Coatings for Surface Micromachines" , SPIE, 3511, 108-113 (1998).

 

 

1997

 

U. Srinivasan, M. R. Houston and R. T. Howe, R. Maboudian, "Self-Assembled Fluorocarbon Films for Enhanced Stiction Reduction", Technical Digest, Proceedings of the 9th International Conference on Solid-State Sensors and Actuators, Transducers '97, pp. 210-213 (1997).

 

R. Maboudian, and R.T. Howe, "Critical Review: Adhesion in Surface Micro-Mechanical Structures", Journal of Vacuum Science and Technology B15, 1-20 (1997).

 

M.R. Houston, R. Maboudian, and R.T. Howe, "Effect of Hydrogen Termination on the Work of Adhesion between Rough Polycrystalline Silicon Surfaces", Journal of Applied Physics81, 3474-3483 (1997).

 

R. Maboudian, and R.T. Howe, "Stiction Reduction Processes for Surface Micromachines",Tribology Letters 3, 215-222 (1997).

 

G.J. Kluth, M.M. Sung, and R. Maboudian, "Thermal Behavior of Alkylsiloxane Self-Assembled Monolayers on the Oxidized Si(100)", Langmuir 13, 3775-378 (1997).

 

M.M. Sung, G.J. Kluth, O.W. Yauw, and R. Maboudian, "Thermal Behavior of Alkyl Monolayers on the Si (100) Surface" , Langmuir, 13, 6164-6168 (1997).

 

G.J. Kluth, M.M. Sung and R. Maboudian, "Interaction of H/D Atoms with Alkylsiloxane Self-Assembled Monolayer on the Si(100) Surface" , Langmuir, 13, 6491-6496 (1997).

 

 

1996

 

M.R. Houston, R. Maboudian, and R.T. Howe, "Self-Assembled Monolayer Films as Durable Anti-Stiction Coatings for Polysilicon Microstructures", Proceedings of the 1996 Solid-State Sensor and Actuator Workshop, Hilton Head '96, pp. 42-47 (1996).

 

G. J. Kluth, and R. Maboudian, "Oxidation Mechanism of Ammonium Fluoride-Treated Si(100) Surfaces", Journal of Applied Physics80, 5408-5414 (1996).

 

 

1995

 

W. Widdra, S. I. Yi, R. Maboudian, G. A. D. Briggs, and W. H. Weinberg , "Adsorption, Abstraction, and Pairing of Atomic Hydrogen on Si(100)-(2x1) Surfaces" , Physical Review Letters 74, 2074-2077 (1995).

 

M.R. Houston, R. Maboudian, and R.T. Howe , "Ammonium Fluoride Anti-Stiction Treatments for Poly-Silicon Microstructures", Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, pp. 210-213 (1995).

 

M.R. Houston and R. Maboudian, "Stability of NH4F-Treated Si(100)" , Journal of Applied Physics78, 3801-3808 (1995).

 

M.R. Houston, R.T. Howe, K. Komvopoulos and R. Maboudian, "Diamond-Like Carbon Films for Silicon Passivation in Microelectromechanical Devices", Materials Research Society Symposium Proceedings,383, 391-402, (1995).